Nanofabrication: Principles And Applications

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches.

This book aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. The book focuses on in-depth studies of a particular research field, and are targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students.