"Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies" ed. by Kenichi Takahata
ITAe | 2013 | ISBN: 9535110853 9789535110859 | 233 pages | PDF | 31 MB
Reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research.